光学学报, 2014, 34 (8): 0822003, 网络出版: 2014-06-13   

基于Zernike多项式和径向基函数的自由曲面重构方法 下载: 533次

Freeform Surfaces Reconstruction Based on Zernike Polynomials and Radial Basis Function
作者单位
南京理工大学电子工程与光电技术学院, 江苏 南京 210094
摘要
对于梯度变化较大的光学自由曲面,采用模式化方法对光学面整体重构,其重构精度受到限制,无法满足要求,而且曲面局部特性无法精确表征。针对以上问题提出了基于Zernike多项式和径向基函数的自由曲面重构方法,提高自由曲面的重构精度。将整个自由曲面分解为多个圆形子区域,在各个圆形子域中采用Zernike多项式作为基函数进行曲面局部拟合,然后利用径向基函数形成整个自由曲面。通过数值实验对5种不同类型的曲面进行重构分析,实验结果表明,自由曲面重构精度优于纳米量级,验证了所提重构方法的适应性和高精度,在现代光学系统制造和检测中具有一定的应用前景,同时对自由曲面重构中的一些关键问题进行了讨论分析。
Abstract
For optical freeform surfaces with steep slopes, the accuracy of overall surface shape reconstruction by modal method is limited and cannot meet the requirements, and the local surface features cannot be characterized accurately. A method based on Zernike polynomials and radial basis function to reconstruct freeform surface is proposed to improve the freeform surface reconstruction accuracy. The entire freeform surface is decomposed into many circular subdomains. The local surface patch is fitted by Zernike polynomials acting as base functions in each subdomain and the overall surface is formed by radial basis function. Numerical experiments are carried out with reconstruction accuracy analysis for five different surfaces. According to the experiments, freeform surface reconstruction accuracy is better than nanometer level. The adaptability and high accuracy of the proposed method are verified, which has great application prospect in the manufacturing and measuring of modern optical systems. At the same time, a few key issues have been discussed and analyzed in the freeform surface reconstruction.

叶井飞, 高志山, 刘晓莉, 王伟, 张聪旸. 基于Zernike多项式和径向基函数的自由曲面重构方法[J]. 光学学报, 2014, 34(8): 0822003. Ye Jingfei, Gao Zhishan, Liu Xiaoli, Wang Wei, Zhang Congyang. Freeform Surfaces Reconstruction Based on Zernike Polynomials and Radial Basis Function[J]. Acta Optica Sinica, 2014, 34(8): 0822003.

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