为了改善光学镜头表面的耐污染性, 选取新型抗油污含氟有机材料、氧化铟锡导电薄膜材料、TiAl合金以及SiO2做为中、高、低折射率镀膜材料.借助TFCalc软件进行膜系设计, 采用离子源辅助沉积的方法, 通过电子束真空镀膜设备进行制备.对比实验发现, 不同的真空度环境以及不同的膜层厚度, 对于薄膜的防油污性能的影响有所差异.通过对防油污性能的测试, 不断优化沉积工艺参量, 获得了在350~700 nm波段平均理论反射率小于1%的宽带减反射膜.该薄膜具有憎水憎油抗污染能力, 牢固度好, 抗辐射能力强, 可应用于**、医疗、民用等各个领域.

In order to improve the contamination resistance of optical lens surface,the new anti-oil fluorine material which contains organic indium-tin oxide, thin film material, TiAl alloys and SiO2 were chosen as coating materials. Film system was designed by the aid of TF-Calc software. The films were prepared by vacuum coating equipment and ion beam assist deposition. The results of experiments showed that in different vacuum degree and different film thickness the performance of anti-oil also different. The functional of anti-oil were tested through experiments and the process parameters of deposition were constantly optimized. The average reflectivity of the broadband antireflection coating is below 1% over the wavelength range from 350 to 700 nm. The film is hydrophobic, oleophobic, antifouling, and has high firmness and radiation protection ability, which can be used in various fields such as military, medical and civilian.