采用溶胶-凝胶法在Si(111)衬底上制备纳米TiO2薄膜，利用电化学阴极还原法对TiO2纳米薄膜掺杂Nd3+，对其结构及光催化活性进行研究，结果显示，所制备的样品均为多晶结构，随着Nd3+掺杂量的增加颗粒尺寸明显减小，比表面积增大.Nd3+的掺杂导致TiO2光催化剂吸光能力增强，同时吸收限红移，提高了光的利用率，并且当掺杂量为1.2%时，光催化活性最好.

The nano- TiO2 doped with Nd3+ have been prepared by chemical solution deposition on silicon substrates, followed by cathodic electrochemical process using neodymium nitrate solition as the Nd source. The X-ray diffraction (XRD) pattern revealed that the Nd3+-doped TiO2 thin film has a nano-multi-crystal structure. With the increase of the neodymium content, the surface areas of Nd3+ -doped TiO2 thin film is larger and the grain diameter decreases, obviously. The existence of the doped element Nd increases the photocatalytic activity of TiO2, and results in red shift of the absorption limit.The highest photocatalytic activity is achieved with the optimal dosage of neodymiumion at 1.2%.