光学学报, 2014, 34 (10): 1012003, 网络出版: 2014-09-09
基于角差法面形测量装置的测角误差研究
Research on Angle Measure Error Based on Method of Angle Difference
测量 大口径反射镜 面形测量 角差法 相对测量 面形误差 measurement large aperture mirror topography measurement method of angle difference testing relative measurement surface figure error
摘要
针对已有的角差法面形检测原理验证装置，分析采用相对测角法测量反射镜表面采样点的斜率并重构面形的测量方式中测角误差的传递方式。通过Matlab软件建立该传递方式的分析模型，并分析测角稳定性误差对面形测量的影响。实验证明该仿真分析的结果可靠有效。
Abstract
According to device of angle difference measurement, analyze how the error of angle measurement affect the topography measurement, while using relatively goniometry to measure the direction of sampling′s normal. Using Matlab software to set up the error transmission model, then analyze the regulation of how stability of angle measurement influence the topography measurement. The experimental result demonstrates this analysis method is reliable.
陈海平, 李佳斌, 刘长春, 熊召, 周海, 袁晓东, 郑万国. 基于角差法面形测量装置的测角误差研究[J]. 光学学报, 2014, 34(10): 1012003. Chen Haiping, Li Jiabin, Liu Changchun, Xiong Zhao, Zhou Hai, Yuan Xiaodong, Zheng Wanguo. Research on Angle Measure Error Based on Method of Angle Difference[J]. Acta Optica Sinica, 2014, 34(10): 1012003.
PDF全文
