中国激光, 2014, 41 (11): 1116001, 网络出版: 2014-09-12   

大口径光学元件精密加工温差分析及控制方法

Temperature Difference Analysis and Control Methods in Precision Finishing of Large-Aperture Optical Component
作者单位
1 中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800
2 中国科学院大学, 北京 100049
摘要
针对大口径光学元件精密加工时上下表面存在温差的问题,以环形抛光系统为例,对抛光盘和工件温度特性进行了研究。在1.6 m环形抛光机上对工件温度进行了测定,结果表明即使在低速抛光情况下工件上下表面也会产生较大的温差。提出了合理搭配工艺参数和对工件非加工面绝热两种温差控制方法。通过采用控制变量法和对工件绝热抛光法进行测温实验验证了方案的可行性,为高精度面形加工奠定了基础。
Abstract
Aiming at the problem that the large-aperture optical component exists difference in temperature between the top and the bottom surfaces in precision finishing, the temperature property of the polishing pad and the workpiece, taking the annular lapping system for example, have been investigated. Significant temperature difference between the top and the bottom surfaces of the optical component is measured even at low rotating speed polishing applying the 1.6 m annular polishing machine. Two effective methods are proposed, one is adjusting the technological parameters, the other is adiabatic polishing. The feasibility of the methods is confirmed by the temperature measurement experiments using control variable and adiabatic polishing. The proposed methods lay the foundation of precision finishing.

焦翔, 朱健强, 樊全堂, 李养帅. 大口径光学元件精密加工温差分析及控制方法[J]. 中国激光, 2014, 41(11): 1116001. Jiao Xiang, Zhu Jianqiang, Fan Quantang, Li Yangshuai. Temperature Difference Analysis and Control Methods in Precision Finishing of Large-Aperture Optical Component[J]. Chinese Journal of Lasers, 2014, 41(11): 1116001.

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