针对天文望远镜对变形镜的需求，设计了200单元级硅基单压电变形镜并对其进行了性能测试。首先，通过有限元方法对单压电变形镜进行结构建模，分析比较了电极排列形式和边界支撑方式对变形镜性能的影响。然后,制备了3款200单元变形镜样机(环形简支，环形固支，六边形简支)。最后，利用干涉仪测量了变形镜的影响函数，并通过激光多普勒测振仪测量其频响特性。仿真与实验结果表明：致动器在50 V电压下变形量可达1 μm，固支条件下谐振频率在1 kHz左右，对前100项Zernike像差具有良好的校正能力。该变形镜在低成本天文自适应光学系统中具有应用潜力。

According to the requirements of astronomical telescopes for Deformable Mirrors (DMs), a silicon unimorph DM with 200 elements were designed and its characteristics were measured. Firstly, the structure model of unimorph DM was developed using finite element method. The influences of the electrode arrangement and the boundary support of the DM on correction capability were investigated. Then, three prototype DMs( annular & simply support， annular & clamped support， and hexagonal & simply support)were fabricated. The influence functions of the fabricated DMs were measured using an interferometer. And the frequency response was measured using a laser Dopplar vibrometer. The simulation and experimental results indicate that the deflection of the actuator is more than 1 μm at 50 V and the resonance frequency of the DM with clamped boundary is about 1 kHz. The DMs have a well correction capability for the first 100 Zernike aberrations. These show that the developed DMs have potential applications for low-cost adaptive optics in astronomy.