针对目前精确定位技术在精微操作领域的应用,设计了基于音圈电机的精密扫描定位装置,用于实现光 谱扫描测量中成像光斑的定位。根据不同电机驱动的对比,选择直线型音圈电机作为精密定位的驱 动装置。结合不同直线型直流电机的分类,详细叙述了音圈电机的工作原理、参数及选择依据。在 结构设计中采用了柔性轴承和悬臂,并对柔性悬臂进行受力分析。结合精确定位及音圈电机的工作 需求,设计了专门的驱动装置。通过实验对扫描定位装置进行性能验证,结果显示,定位装置的 稳定时间小于30 ms,长时间的偏移小于1.5 μm,满足扫描定位的微米量级的设计要求。

In order to develop the technology of precise positioning which was applied in the field of micro-operation widely, a precise device of scanning and positioning based on voice-coil actuator was designed and applied on positioning of imaging facula in the measurement of spectra. Based on the contrast of different motor driver, the linear voice-coil actuator was selected as the driving device of precise positioning. According to the classification of different linear DC-motor, working principle, parameters and the basis of selection of the voice-coil actuator were described. The flexible bearing and cantilever were introduced in the structure design, and the stress analysis of the flexible cantilever was performed. With the demand of precise positioning and the working of voice-coil actuator, the special driving device was designed. The performance validation of the scanning device was adopted. The results show that the stable time of the scanning and positioning device is less than 30 ms and the long time working excursion is less than 1.5 μm, so the design requirements of micro-meter of the device were accomplished.