为了实现口径150 mm凸双曲面SiC反射镜的面形检测，分别设计了传统的Hindle球检测、Simpson Hindle式检测和非球面样板法检测。经过检测精度、公差等方面的比较，选取了检测精度高、公差宽松、支撑结构简单的Hindle球检测方案。经过研磨、抛光等加工过程，目前面形精度达到0.023λ(均方根值)。在检测光路的对准和几何量测量方案中，提出采用干涉仪和激光跟踪仪相结合的方法，利用干涉仪对靶标球球面干涉检测对准，分别测量得到干涉仪出射光会聚点和Hindle球心的空间坐标，这两点对应着被检测凸双曲面的两个几何焦点，进一步计算得到被检双曲面的几何参数。误差分析表明，采用这种方法顶点曲率半径R和二次常数K的测量精度分别达到0.053 mm和9.6×10-5。

In order to realize the optical measurement of 150 mm SiC convex hyperboloidal mirror, the traditional Hindle sphere testing, Simpson Hindle testing and aspheric plate testing methods are designed. These methods are compared in accuracy, tolerance, et al.. The Hindle sphere testing is chosen because of higher accuracy, loose tolerance and simple support structure. After grinding and polishing, the surface error is 0.023λ (mean square root). In the alignment, a method based on laser tracker and interferometric testing of Hindle sphere is proposed. The sphere mounted retrofeflector of laser tracker is interferometric tested and the positions are measured, which are corresponding to the two geometry focuses of hyperboloidal surface. Then the vetex radius and conic constant can be calculated by the data. The error analysis shows that the accuracy are 0.053 mm and 9.6×10-5 for the vertex radius and conic constant, respectively.