激光与光电子学进展, 2015, 52 (1): 012203, 网络出版: 2014-12-31  

夹紧力作用下镜面变形及夹紧重复性研究

Investigation of Surface Deformation under Clamping Force and Clamping Repeatability
作者单位
中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033
摘要
利用有限元方法对运动学支撑夹紧力引起的镜片光学表面变形进行静力学分析,并应用Zernike 多项式对镜片表面的变形进行了拟合。结果表明,夹紧力作用下镜片表面产生的几种主要像差为Defocus、Pri Trefoil 和PriHexafoil。光学检测过程中,运动学支撑结构的重复装配误差可能会影响检测精度,因此分析了运动学支撑夹紧重复性对镜面面形的影响。以夹紧力大小、夹紧力径向位置、夹紧力周向位置变化引起的镜面表面峰谷(PV)值和均方根(RMS)值的变化作为评价夹紧重复性的依据。分析结果表明,镜片表面的PV 值和RMS 值变化不明显,说明所设计的运动学支撑结构在多次重复性的检测中允许装配过程存在一定的误差。
Abstract
Geometrical deformation of lens surface caused by kinematic mount clamping force is analyzed with finite element method and lens surface displacements are extracted and fitted with Zernike polynomials. Analytical results show that Defocus、Pri Trefoil and Pri Hexafoil are the main aberrations under clamping force. During the process of optical testing, repeating assembly of the kinematic mount apparatus may influence the testing accuracy, so relations between assembly repeatability and surface deformation are also investigated. In order to evaluate the repeatability for assembling, variations of peak valley (PV) and root mean square (RMS) values changed with clamping force and clamping placement in circumferential and radial direction are also shown in this paper. The results indicate that PV and RMS values do not obviously change as clamping force and clamping placement change, which means that slight assembly errors of the kinematic mount apparatus are allowed.

周连生, 于新峰, 张巍. 夹紧力作用下镜面变形及夹紧重复性研究[J]. 激光与光电子学进展, 2015, 52(1): 012203. Zhou Liansheng, Yu Xinfeng, Zhang Wei. Investigation of Surface Deformation under Clamping Force and Clamping Repeatability[J]. Laser & Optoelectronics Progress, 2015, 52(1): 012203.

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