本文理论研究了金属 -介质多层膜光学超衍射材料频谱滤波的物理机制。严格矢量分析光波在金属 -介质多层膜中频谱耦合传输的带通行为规律, 理论分析单元厚度、填充比、膜层材料虚部和 Al/MgF2多层膜对数对空间频谱的带通窗口和透射振幅的影响因素。研究表明单元厚度和填充比主要影响空间频谱的带通窗口, 膜层材料虚部和膜层对数主要影响空间频谱的透射振幅。该研究结果有望应用于超分辨成像光刻、表面等离子体结构照明、表层显微和生物传感等领域。

The rigorous coupled wave analysis is used to analyze the spatial spectrums filtering of light coupling in the metal-dielectric multilayer metamaterials. The band pass window and transmission amplitude of spatial spectrums in the Al/MgF2 metamaterials are carefully investigated for different unit thickness, filling ratio, film loss and pairs of Al/MgF2 multilayers. It is demonstrated that the band pass window is mainly determined by the unite thickness and filling ratio, while the transmission amplitude is mainly determined by the imaginary loss and pairs of film materials. This research has potential application in the superresolution imaging lithography, surface plamons structured illumination, ultrathin surface microscopy and bio sensing etc.