在考虑中红外高反膜系的非均匀吸收情况下，利用ANSYS 有限元分析软件，建立了带高反膜系的变形镜模型。定量分析了连续激光辐照下，变形镜的温升、热形变及其对光束质量的影响。研究结果表明，在使用有限元软件进行分析时，高反膜系的非均匀吸收不可忽略；变形镜极头间距越窄，热形变带来的波前畸变空间频率越高；当入射波前峰谷(PV)值与变形镜热形变面形PV 值相差不大时，热形变带来的影响最明显；在总吸收能量一定的情况下，入射激光功率越大，热形变对光束质量的影响越明显。此外，针对不同的换热条件，讨论了变形镜热形变对光束质量的影响，进而针对热形变的产生机理，提出采用局部换热方式降低变形镜的热形变。

Considering the non- uniform absorption of mid-infrared film with high reflectivity, the model for the deformable mirror (DM) with high reflectivity films is built up using the finite element analysis software ANSYS. The temperature rise and thermal distortion of the DM radiated by the continuous laser beam are calculated, and their effects on beam quality are analyzed quantitatively. The results indicate that the nonuniform absorption of the high reflectivity film should not be neglected by using finite element analysis software. The narrower the heads spacing are, the higher the spatial frequency caused by the thermal distortions is. The effect is most obvious for the case of the incident laser beam with the peak-to-valley (PV) value of the wave distortion similar to that of the thermal distortion. For the given total absorption energy, the higher the incident laser power is, the more obvious the effect on beam quality caused by the thermal distortion is. In addition, according to different heat transfer conditions, the effect of the thermal distortion of the DM on beam quality is also discussed, and the local heat transfer mode is proposed according to the mechanism of the thermal distortion.