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准分子激光脉冲能量探测器的设计与性能测试

Development and Performance Testing of Pulsed Excimer Laser Energy Detector

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摘要

在以准分子激光为光源的步进扫描投影光刻机中,为了精确控制曝光剂量,需要用能量探测器实时、精确地监测单个激光脉冲的能量。研制了一种主要由聚光镜、积分棒、特殊晶体、滤光片、光电探测器和信号处理电路组成的准分子激光脉冲能量探测器;提出采用二阶有源低通滤波电路对窄脉冲信号进行整形处理以降低后续信号处理的难度;搭建测试装置对所研制的能量探测器进行了性能测试。测试结果表明,能量探测器输出的脉冲信号时间参数的实测值与设计值的相对误差约为3%,且其响应时间满足4 kHz高重频的应用要求;采用双光束比对法消除准分子激光单个脉冲能量波动对测试结果的影响,得到能量探测器的测量重复性为0.26%,在入射光束脉冲能量为0.1~1 μJ 的动态范围内具有良好线性,其线性拟合方程为V=0.59841E-0.01508,相应的线性相关系数R2=99.976%。测试结果证明二阶有源低通滤波电路可以实现窄脉冲信号整形;设计的能量探测器具有良好的重复性和线性,可用于光刻机中高重频准分子激光单个脉冲能量的精确测量。

Abstract

In step and scan lithographic tools whose laser sources are excimer lasers, an energy detector is needed to monitor excimer laser pulse energy in real-time and accurately so as to realize precise exposure dose control. An energy detector, which is composed by focusing lens, an integration rod, a special crystal, a filter, a photodiode and a signal processing circuit, is designed. Specially, the second-order active low-pass filter is used for narrow pulse shaping so as to reduce the difficulty of the signal processing circuit. Also, an experimental setup is designed to testing the performances of the energy detector. The results show that the relative error between the measured value and the designed value of the shaped pulse for the energy detector is about 3% , and the response time of the energy detector can meet the application of pulse energy measurement with pulse′ s repetition rate up to 4 kHz. Secondly, with a double-beam ratiometric method which is used to remove excimer laser pulse energy fluctuation, the performances of the energy detector are tested; the energy detector′s repeatability is 0.26%; within a dynamic range of pulse energy from 0.1 μJ to 1 μJ per pulse, the linear fit is V=0.59841E-0.01508 and R2=99.976% . Experimental results prove that the secondorder active low-pass filter can be used for pulse shaping; the repeatability and the linearity of the designed energy detector are perfect, and the energy detector can be used to accurately measure the energy of high repetition rate pulse for excimer lasers in lithographic tools.

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补充资料

中图分类号:TN247;TN248.2;TN721.5

DOI:10.3788/cjl201542.0102006

所属栏目:激光物理

收稿日期:2014-06-03

修改稿日期:2014-08-20

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谢承科:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049
陈明:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049
杨宝喜:中国科学院上海光学精密机械研究所, 上海 201800
黄惠杰:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049

联系人作者:谢承科(xchke@126.com)

备注:谢承科(1982—),男,博士研究生,主要从事精密光电测量技术方面的研究。

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引用该论文

Xie Chengke,Chen Ming,Yang Baoxi,Huang Huijie. Development and Performance Testing of Pulsed Excimer Laser Energy Detector[J]. Chinese Journal of Lasers, 2015, 42(1): 0102006

谢承科,陈明,杨宝喜,黄惠杰. 准分子激光脉冲能量探测器的设计与性能测试[J]. 中国激光, 2015, 42(1): 0102006

被引情况

【1】闫文兵,杨勇,季凯俊,叶晖,程学武,杨国韬,刘中正,王积勤,林鑫,宋沙磊,郑金州,肖亦然,杜丽芳,李发泉. 多通道单脉冲激光能量变化监测方法. 中国激光, 2020, 47(12): 1201004--1

【2】刘志帆,陈明,步扬,徐静浩,范李立,张建华,王向朝. 光刻机扫描狭缝刀口半影宽度测量技术. 中国激光, 2019, 46(10): 1004005--1

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