激光与光电子学进展, 2015, 52 (1): 013102, 网络出版: 2014-12-19
脉冲激光沉积Pd/Ag膜的工艺研究 下载: 524次
Research on the Technology of Pulsed Laser Deposition of Pd/Ag Films
材料 薄膜 传感器 Pd/Ag 合金膜 脉冲激光沉积 真空镀膜 materials thin films sensors Pd/Ag alloy films pulsed laser deposition vacuum coating
摘要
脉冲激光沉积(PLD)镀膜法是一种制备光纤氢气传感器的潜在方法,利用脉冲准分子激光低温沉积技术,在光纤法布里-珀罗(F-P)腔的敏感膜片上制备了钯/银(Pd/Ag)合金薄膜,X 射线衍射(XRD)和原子力显微镜(AFM)表征显示在较高的脉冲激光能量和低温下可以获得结晶度好的Pd/Ag 合金薄膜。将该F-P 腔封装在限制Pd/Ag 膜层吸氢后膨胀方向的套管结构中,利用Pd/Ag 膜层吸氢后膨胀导致F-P 腔腔长改变的特性制备了氢气传感探头来测试该Pd/Ag 膜的氢气敏感特性,实验结果表明,该传感器可以用来检测氢气浓度的变化。
Abstract
Pulsed laser deposition is a potential preparation method for optical fiber hydrogen sensor. Pd/Ag thin films are prepared through pulsed laser deposition at a low temperature by excimer laser. It is found that Pd/Ag thin films with fine crystal structure are obtained under high pulse laser energy at low temperature by X-ray diffraction (XRD) and atomic force microscope (AFM) methods. The F-P sensor is packaged in a casing structure that can limit the expansion direction of Pd/Ag thin films which absorbs hydrogen. Hydrogen sensing probe is made to test the hydrogen sensing properties of Pd/Ag thin films for the characteristic that the expansion of Pd/Ag thin films which absorbs hydrogen can lead to the change of the F-P cavity. Experiment results show that the sensor can be used to detect the changes of the hydrogen concentration.
胡畔, 童杏林, 胡巍, 蔡婷, 郭倩, 王坤, 赵敏利. 脉冲激光沉积Pd/Ag膜的工艺研究[J]. 激光与光电子学进展, 2015, 52(1): 013102. Hu Pan, Tong Xinglin, Hu Wei, Cai Ting, Guo Qian, Wang Kun, Zhao Minli. Research on the Technology of Pulsed Laser Deposition of Pd/Ag Films[J]. Laser & Optoelectronics Progress, 2015, 52(1): 013102.