半导体光电, 2014, 35 (6): 1022, 网络出版: 2014-12-26
干湿结合法在CdZnTe衬底上制备折射型红外微透镜的研究
Study on Infrared Refractive Micro-lens Prepared by Dry and Wet Etching on Cdznte Substrate
摘要
针对现有微透镜加工方法难以在红外探测器衬底材料CdZnTe上实现大孔径、深浮雕微透镜制备, 提出了一种利用ICP-RIE干法刻蚀结合化学湿法腐蚀制备折射微透镜的方法, 通过采用多次光刻套刻后分别对CdZnTe材料进行高刻蚀速率、低损伤的ICP-RIE刻蚀, 制备出具有深浮雕结构的微透镜雏形, 最后采用溴-乙醇溶液腐蚀成形, 成功在CdZnTe衬底上制备了深度达60μm的连续深浮雕结构的微透镜线列, 并对该微透镜的面形轮廓和光学性能进行了测试分析, 在红外探测器的微光学元件领域有着巨大的应用前景。
Abstract
It is difficult for the existing processing methods to achieve the fabrication of micro-lens with large numerical aperture and deep relief on the CdZnTe substrate material. So in this paper, presented is a method combining ICP-RIE dry etching with chemical wet etching to prepare refractive micro-lens by ICP-RIE etching with high etching rate and low damage respectively after multiple overlay on CdZnTe substrate. Finally with chemical corrosion of bromine-ethanol solution, linear micro-lenses with a depth of 60μm and continuous deep relief structure are successfully fabricated on CdZnTe substrate. Then the surface outline and optical properties of micro-lenses are tested and analyzed. It has a great application prospect in the field of micro-optics elements of infrared detectors.
徐鹏霄, 乔辉, 王仍, 刘诗嘉, 曾巧玉, 张可锋, 李向阳. 干湿结合法在CdZnTe衬底上制备折射型红外微透镜的研究[J]. 半导体光电, 2014, 35(6): 1022. XU Pengxiao, QIAO Hui, WANG Ren, LIU Shijia, ZEN Qiaoyu, ZHYANG Kefeng, LI Xiangyang. Study on Infrared Refractive Micro-lens Prepared by Dry and Wet Etching on Cdznte Substrate[J]. Semiconductor Optoelectronics, 2014, 35(6): 1022.