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低能离子束诱导蓝宝石自组织纳米结构与光学性能研究

Self-Organizing Nano-Structure and Optical Properties of Sapphire Induced by Low Energy Ion Beam

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摘要

针对蓝宝石有序纳米结构的制备,使用微波回旋共振离子源,研究了低能Ar+离子束在不同参数下刻蚀蓝宝石(C 向)表面形成的自组织纳米结构及其光学性能。结果表明,当离子束入射能量为1200 eV、束流密度为265 μA/cm2 时,随着入射角度的增大(5°~40°),样品表面出现点状自组织纳米结构,该结构的有序性较差;当增加角度到45°时,样品表面出现了有序的条纹结构,在45°~70°时,增大离子束入射角度,样品表面沿离子束入射方向出现柱状结构,而在垂直于离子束入射方向,样品表面呈现出有序的条纹结构;随着离子束入射角度的增加,样品表面的纳米条纹结构的特征波长先减小(45°~60°)后逐渐增大(60°~70°),在60°附近,特征波长达到极小值,约为21.1 nm。在70°~75°时,样品表面呈现纵横比较大的纳米点状结构。增加离子束的作用时间,样品表面的纳米结构纵向尺寸增大,有序性增加,但纳米结构横向周期基本不变。有序纳米结构的出现使得样品的透射率得到提升。自组织结构变化是溅射粗糙化和表面驰豫机制相互作用的结果。

Abstract

Electron cyclotron resonance (ECR) ion source is employed to erode the surface of sapphire (crystal orientation C) and the eroding effects and optical properties beams are researched at different low energy Ar + ion-beam incident angles. The experimental results indicate that, with ion beam energy 1200 eV, and beam current density 265 μA/cm2 , the increase of incident angle (5° ~40° ) obtains dot patterns on the sample surfaces; when the incident angle continues to increase up to 45°, orderly ripple structures appear on sample surfaces; the increase of incident angle (45°~70°) achieves column structures on sample surfaces in the direction of incident angle and orderly ripple structures in the direction perpendicular to incident angle; with the increase of incident angle, ripple wavelength on the sample surface firstly decreases slightly (45°~60°) and then gradually enlarges (60° ~70° ); when the incident angle is within 70° ~75° , dot patterns with larger aspect ratio emerge on sample surfaces. Eroding time extension is unable to change nano-struture topographies, but able to increase the vertical nano-structure dimensions and enhance the orderliness. In addition, enhancement of surface orderliness and height of nano-structures results in the increase of transmittance, which accounts for sample surface antireflections. The transformation of self-organized nano-structure patterns result from the interaction of spurting roughness and relaxation mechanism.

Newport宣传-MKS新实验室计划
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中图分类号:O484.4+1

DOI:10.3788/cjl201542.0306003

所属栏目:材料与薄膜

基金项目:欧盟第七科技框架玛丽居里计划项目(247644)、陕西省教育厅重点实验室科研计划项目(14JS028)、国家科技重大专项经费资助(2013ZX04006011)

收稿日期:2014-09-16

修改稿日期:2014-10-20

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陈智利:西安工业大学光电学院, 陕西省薄膜技术与光学检测重点实验室, 陕西 西安 710032
刘卫国:西安工业大学光电学院, 陕西省薄膜技术与光学检测重点实验室, 陕西 西安 710032
杨利红:西安工业大学光电学院, 陕西省薄膜技术与光学检测重点实验室, 陕西 西安 710032

联系人作者:陈智利(medichen@163.com)

备注:陈智利(1973—),男,博士,副教授,主要从事微纳米制造技术方面的研究。

【1】B Ziberi, F Frost, B Rauschenbach, et al.. Highly ordered self-organized dot patterns on Si surfaces by low-energy ion-beam erosion[J]. Appl Phys Lett, 2005, 87(3): 033113.

【2】B Ziberi, F Frost, B Rauschenbach. Formation of large-area nanostructures on Si and Ge surfaces during low energy ion beam erosion[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2006, 24(4): 1344-1348.

【3】S Facsko, H Kurz, T Dekorsy. Energy dependence of quantum dot formation by ion sputtering[J]. Phys Rev B, 2001, 63(16): 165329.

【4】B Ziberi, F Frost, M Tartz, et al.. Ripple rotation, pattern transitions, and long range ordered dots on silicon by ion beam erosion[J]. Appl Phys Lett, 2008, 92(6): 063102.

【5】F Frost, B Ziberi, A Schindler, et al.. Surface engineering with ion beams: From self-organized nanostructures to ultra-smooth surfaces[J]. Appl Phys A: Materials Science & Processing, 2008, 91(4): 551-559.

【6】F Frost, B Ziberi, T Hoche, et al.. The shape and ordering of self-organized nanostructures by ion sputtering[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2004, 216: 9-19.

【7】Chen Zhili, Liu Weiguo. Microstructures and optical properties of crystalline Si surface modified by low energy ion beam Erosion[J]. Chinese Journal of Vaccuum Science and Technology, 2013, 33(8): 826-831.
陈智利, 刘卫国. 低能斜入射离子束诱导单晶硅纳米结构与光学性能研究[J]. 真空科学与技术学报, 2013, 33(8): 826-831.

【8】Zhang Rui, Zhu Yabin, Bi Yu, et al.. Fabrication and its optical properties of ordered ZnO nanoparticle arrays[J]. Acta Optica Sinica, 2014, 34(6): 0630003.
张锐, 朱亚彬, 毕玉, 等. 有序ZnO 纳米阵列的制备及其光学特性[J]. 光学学报, 2014, 34(6): 0630003.

【9】Chen Zhili, Liu Weiguo. Nanodots pattern and optical properties of monocrystalline silicon induced by low energy ion beam[J]. Acta Optica Sinica, 2013, 33(9): 0922003.
陈智利, 刘卫国. 低能离子束诱导单晶硅点状纳米结构与光学性能研究[J]. 光学学报, 2013, 33(9): 0922003.

【10】Shang Peng, Xiong Shengming. Design and error analysis of sub-wavelength antireflective micro-structure on surface of ZnSe substrate[J]. Chinese J Lasers, 2014, 41(1): 0116004.
尚鹏, 熊胜明. ZnSe衬底表面亚波长增透结构的设计及误差分析[J]. 中国激光, 2014, 41(1): 0116004.

【11】Luo Haihan, Cai Qinyuan, Li Yaopeng, et al.. Optical character study of silicon optical films in different deposited temperatures[J]. Acta Optica Sinica, 2014, 34(4): 0431001.
罗海瀚, 蔡清元, 李耀鹏, 等. 不同沉积温度下非晶硅光学薄膜的光学特性研究[J]. 光学学报, 2014, 34(4): 431001.

【12】Chen Zhili, Liu Weiguo. Surface topography and optical properties of monocrystalline silicon induced by low energy different ion beam parameters[J]. Infrared and Laser Engineering, 2013, 42(9): 2490-2495.
陈智利, 刘卫国. 不同离子束参数诱导单晶硅纳米微结构与光学性能[J]. 红外与激光工程, 2013, 42(9): 2490-2495.

【13】Huang Chengqing, Xia Yang, Chen Bo, et al.. Study progress of the manufacturing process of patterned sapphire substrates[J]. Semiconductor Technology, 2012, 37(7): 497-503.
黄成强, 夏洋, 陈波, 等. 图形化蓝宝石衬底工艺研究进展[J]. 半导体技术, 2012, 37(7): 497-503.

【14】Fan Zhigang, Liu Jianjun, Xiao Haosu, et al.. Research progress on growth technique and application of sapphire single crystal[J]. Journal of the Chinese Ceramic Society, 2011, 39(5): 880-891.
范志刚, 刘建军, 肖昊苏, 等. 蓝宝石单晶的生长技术及应用研究进展[J]. 硅酸盐学报, 2011, 39(5): 880-891.

【15】R M Bradley, J M Harper. Theory of ripple topography induced by ion bombardment[J]. Journal of Vacuum Science & Technology A, 1988, 6(4): 2390-2395.

【16】M A Makeev, R Cuerno, A L Barabasi. Morphology of ion-sputtered surfaces[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2002, 197(3-4): 185-227.

引用该论文

Chen Zhili,Liu Weiguo,Yang Lihong. Self-Organizing Nano-Structure and Optical Properties of Sapphire Induced by Low Energy Ion Beam[J]. Chinese Journal of Lasers, 2015, 42(3): 0306003

陈智利,刘卫国,杨利红. 低能离子束诱导蓝宝石自组织纳米结构与光学性能研究[J]. 中国激光, 2015, 42(3): 0306003

被引情况

【1】费芒芒,陈智利,刘卫国,刘雨昭,惠迎雪. 低能Kr+离子束诱导蓝宝石晶体实验研究. 光子学报, 2019, 48(6): 616004--1

【2】刘雨昭,陈智利,费芒芒,惠迎雪,刘卫国. 不同氪离子束参数下的蓝宝石辐照实验. 激光与光电子学进展, 2019, 56(12): 121601--1

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