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基于微机电系统技术的高性能集成型微富集器

High performance integrated micro-fabricated pre-concentrator based on MEMS

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摘要

由于大部分环境样品的浓度非常低, 为了实现其直接检测, 提出将一种集成化的微型富集器应用到色谱系统中。富集器可实现色谱系统的进样与样品富集,能将色谱仪的检测限提高1~2个数量级。设计的富集器采用了高容量4平行通道结构,沟道内填充了高吸附率的Tenax-TA吸附材料,来实现对环境样品中挥发性有机化合物组分的富集。此外,为了密闭热解吸过程中所释放的组分,在微型富集器后集成了微型阀。试验结果表明,研制的微型富集器取得了15倍以上的富集因子。而且,通过微阀的控制,色谱峰的拖尾和峰展宽得到了有效的控制。因此,该微型富集器可广泛应用到环境样品的快速检测中,提高各检测器对复杂环境的适应能力。

Abstract

The concentration of most environmental samples is very low. In order to directly detect these samples, an integrated micro pre-concentrator, which can significantly improve detection limit of mini gas chromatography system with 1-2 orders, is developed. The micro pre-concentrator has 4 parallel channels filled with enough Tenax-TA as adsorbent materials for concentrating volatile organic compounds. For closing the released components during thermal desorption process, a micro-valve is integrated behind the pre-concentrator. The result demonstrates the proposed pre-concentrator can effectively concentrate components with a concentration factor of 15. Moreover, the chromatography peak broadening is greatly compressed under controlling by the micro-valve. Therefore, the micro-fabricated pre-concentrator can be easy to deploy and suitable for a number of applications involving on-site monitoring of environmental samples.

Newport宣传-MKS新实验室计划
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中图分类号:TN242

DOI:10.11884/hplpb201527.024124

基金项目:supported by National Natural Science Foundation of China (61176112, 60976088);Beijing Science and Technology Plan Project (Z141100003414003)

收稿日期:2014-10-22

修改稿日期:2014-11-19

网络出版日期:--

作者单位    点击查看

孙建海:中国科学院 电子学研究所, 传感技术国家重点实验室, 北京 100190
宁占武:北京市劳动保护科学研究所, 北京 100054
马天军:中国科学院 电子学研究所, 传感技术国家重点实验室, 北京 100190
朱小锋:北京市劳动保护科学研究所, 北京 100054
崔大付:中国科学院 电子学研究所, 传感技术国家重点实验室, 北京 100190
张璐璐:中国科学院 电子学研究所, 传感技术国家重点实验室, 北京 100190
李辉:中国科学院 电子学研究所, 传感技术国家重点实验室, 北京 100190
陈兴:中国科学院 电子学研究所, 传感技术国家重点实验室, 北京 100190

联系人作者:Sun Jianhai(jhsun@mail.ie.ac.cn)

备注:Sun Jianhai(1973—), male, PhD candidate, engaged in MEMS devices and micro GC system

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引用该论文

Sun Jianhai,Ning Zhanwu,Ma Tianjun,Zhu Xiaofeng,Cui Dafu,Zhang Lulu,Li Hui,Chen Xing. High performance integrated micro-fabricated pre-concentrator based on MEMS[J]. High Power Laser and Particle Beams, 2015, 27(2): 024124

孙建海,宁占武,马天军,朱小锋,崔大付,张璐璐,李辉,陈兴. 基于微机电系统技术的高性能集成型微富集器[J]. 强激光与粒子束, 2015, 27(2): 024124

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