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高功率激光装置中靶的定位调试

Target positioning in high power laser device

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摘要

为了提高高功率激光装置中靶定位调试的效率和精度, 提出了一种仿真初调和实验误差分析相结合的靶定位调试方法。该方法采用3-CCD传感器进行定位监测, 利用OpenGL成像技术实现CCD仿真图像的采集, 并对目标靶、送靶机构等进行虚拟构建。 基于仿真实验分析了实际系统中靶定位的误差来源, 包括图像检测误差、3-CCD传感器的装校误差及送靶机构的定位误差等。靶定位算法的调试和初步验证在仿真系统中独立进行, 实现了理想条件下的零误差定位调整; 调试后的算法在实际系统中的靶定位精度小于±5 μm, 角度误差为±0.015°。由于仿真初调可脱离实验平台进行, 故有效地提高了工程效率。提出的调试方法在实际系统中的定位精度满足高功率激光打靶的要求。

Abstract

A target positioning method based on simulation primary adjustment and experimental error analysis was proposed to improve the efficiency and precision of target positioning in a high power laser device. A 3-CCD sensor was used to positioning and the "OpenGL" graphics software was used to capture CCD simulation images and to construct a cylindrical cavity target and a target-sending mechanism virtually. Then, the positioning precision of the experimental system was discussed, including the image detection error, the calibration error of 3-CCD sensor and the movement errors of the target-sending mechanism. The accuracy of the positioning method was confirmed in the simulation system independently by adjusting the target to a desired position without errors. In the experiment, the precision of the target positioning is less than ±5 μm and the orientation error is ±0.015°. It indicates that the simulation primary adjustment can be implemented from the experimental platform, so the working efficiency is improved. The experimental result shows that the proposed method satisfies the precision requirements of the target positioning in high power laser devices.

Newport宣传-MKS新实验室计划
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中图分类号:TN248

DOI:10.3788/ope.20152302.0520

所属栏目:微纳技术与精密机械

基金项目:国家自然科学基金资助项目(No. 61105029); 上海市浦江人才计划资助项目(No. 11PJ1403700); 上海市“机械电子工程”创新团队资助项目。

收稿日期:2014-03-25

修改稿日期:2014-05-20

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宋薇:上海大学 机电工程与自动化学院, 上海 200072
章亚男:上海大学 机电工程与自动化学院, 上海 200072
沈林勇:上海大学 机电工程与自动化学院, 上海 200072

联系人作者:宋薇(song_wei@shu.edu.cn)

备注:宋薇(1981-), 女, 辽宁铁岭人, 博士, 副研究员, 2006年、2009年于日本福井大学分别获得硕士、博士学位, 主要从事机器视觉及精密测量方面的研究。

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