利用激光反馈来测量物体的三维形貌, 根据物品表面的离焦量与激光器输出功率的关系, 给出一种深度信息的测量算法, 并建立一种物体三维形貌测量系统。系统扫描物体表面的每一个点, 通过对每点最大电压信号的测量判断并记录扫描平台运行的距离, 从而实现每点的深度信息测量, 最终完成三维形貌测量。通过实验, 完成了对样品局部的三维测量, 证明了深度方向测量的可行性, 并分析了实验中的影响因素。

According to the relationship between the defocusing length and the laser output power, a measurement system is established and an algorithm about depth measurement is proposed to measure the 3D profile of the object. The system scans every point of the surface and makes a judgment about the max voltage to record the defocusing length. The 3D measurement of the parts of the sample is examined in the experiments and proved to be feasible. Some factors that affect the results are also analyzed.