利用低压等离子体聚合技术在不同工作压强下制备了辉光放电聚合物 (GDP) 薄膜。利用原子力显微镜、傅里叶红外光谱仪、元素分析仪和紫外-可见光谱仪对GDP薄膜的表面形貌、化学结构、碳氢原子数比以及光学性质进行了表征。分析了工作压强对薄膜表面形貌、化学结构、碳氢原子比和光学性质的影响以及相互关系。结果表明: GDP薄膜的表面形貌随工作压强的增大而变得平整光滑, 均方根粗糙度逐渐减小。随工作压强增大, GDP薄膜的化学结构的相互交联化程度减弱, C=C双键含量不断减小, 碳氢原子数比不断减小, 氢元素含量逐渐增大, 薄膜的光学透过率截止波长发生“蓝移”, 光学间隙不断增加。

Using low pressure plasma polymerization technology, glowing discharge polymer films were fabricated at different coating pressures. Surface roughness, chemistry structure and optical properties were measured by atomic force microscopy, infrared absorption spectroscopy and ultraviolet-visible transmittance spectroscopy, respectively. The results show that as the coating pressure increases, the surface roughness of the GDP film and content of the olefinic carbon bonds decrease, while the hydrogen and SP2 CH2 concentration and the optical band gap of GDP films increases.