研究并制作了以钇铝石榴石(YAG)透明陶瓷为基底材料的衍射光栅元件。通过磁控溅射技术在YAG透明陶瓷表面溅射一层均匀致密的金属铬, 获得带有硬掩模的陶瓷样品。借助接触式曝光系统进行光刻, 反复试验, 获得带有衍射光栅的YAG透明陶瓷样品。经光学轮廓仪检测, 样品铬膜厚0.072 μm, 光栅细节得到完好保留。实际光栅的衍射图样再次验证了以YAG透明陶瓷代替传统微光刻基底材料制作衍射光栅的可行性, 使得衍射光栅在更为复杂的环境下发挥作用成为可能。

Diffractive grating element based on yttrium aluminum garnet (YAG) transparent ceramics substrate was fabricated and researched. A uniform dense metal chrome film was deposited on YAG transparent ceramics by direct current(DC) reactive magnetron sputtering. The YAG transparent ceramics with hard mask were obtained. The photolithography was accomplished by contact UV-lithography system, and the YAG transparent ceramics sample with diffractive grating was obtained by trial and error. Testing results show the thickness of chrome film is 0.072 μm by optical profiler, the details of diffractive grating in the sample are remained perfectly. The feasibility of fabricating diffractive grating by substituting YAG transparent ceramics for traditional photolithography substrate has also been proved by the diffraction pattern of this grating. It is concluded that this research makes possible to use diffractive grating in a more complex environment and has broad prospects in application.