透镜作为光学系统中最基本的光学元件,其中心厚度的加工误差和装配精度将直接关系到整个光学系统的成像质量.对镜面间距非接触测量技术进行了研究,重点介绍了图像法、轴向色散法、差动共焦法、低相干光干涉法等方法的测量原理和研究进展,指出了这些方法的优缺点和适用范围.这些方法都能满足一般光学系统的精度要求,其中低相干光干涉法测量精度最高,轴向色散法、差动共焦法次之,图像法测量精度最低.对光学镜面间距测量技术的发展趋势进行了论述.

As the most basic optical element in the optical system,the center thickness machining precision and assembly precision of the lens directly affect the imaging quality of the optical system.Kinds of non-contact measuring methods that have been proposed in recent years are introduced.The working principles and developing trends of the imaging method,axial dispersion measuring method,differential confocal measuring method,low coherence interferometry measuring method are described,as well as their own advantages and disadvantages.These methods can satisfy the precision requirement of the optical system,and the low coherence interferometry method provides the highest precision.The axial dispersion method and the confocal method comes second,and the imaging method is the last one.The developing direction of the lens gap measurement technology is discussed.