Chinese Optics Letters, 2015, 13 (3): 032201, Published Online: Sep. 25, 2018  

Real-time surface figure monitoring of optical elements in continuous polishing Download: 812次

Author Affiliations
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Abstract
A real-time monitoring system is set up based on a computer, dynamic interferometer, beam expanding system, and a beam reflecting system. The stability and repeatability of the monitoring system is verified. A workpiece and a glass monitoring plate are placed in the same ring. The surface figure of the workpiece, monitored by the monitoring plate, synchronizes with the surface of the glass monitoring plate in terms of peak–valley and power. The influence of the reflection and transmission surface are discussed in theory and a numeral deviation in online and offline testing data is quantitatively analyzed. The new method provides a quick and easy real-time method to characterize changes to the optical surface during polishing.

Jun Chen, Xueke Xu, Chaoyang Wei, Minghong Yang, Jianxun Gu, Jianda Shao. Real-time surface figure monitoring of optical elements in continuous polishing[J]. Chinese Optics Letters, 2015, 13(3): 032201.

引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!