光学学报, 2015, 35 (4): 0412004, 网络出版: 2015-04-03
同步移相干涉仪中的延迟阵列移相特性研究
Research on Phase-Shifting Characteristic of Retarder Array in Simultaneous Phase-Shifting Interferometer
测量 光学测量 干涉 同步移相 延迟阵列 measurement optical measurement interferometry simultaneous phase-shifting retarder array
摘要
为了研究同步移相干涉仪中延迟阵列的移相特性,采用琼斯矢量和琼斯矩阵作为偏振光和偏振光传递的参量和模型,分析推导了延迟阵列的移相量与快轴方位角误差之间的传递关系,给出了误差传递函数公式,在没有精确校准延迟阵列快轴方位角的情况下,搭建了基于延迟阵列移相的测量装置,利用该装置和Zygo GPI XP 型干涉仪测量同一块球面镜,测量波面均方根值相差0.003λ,峰谷值相差0.033λ。讨论了延迟阵列方位角误差容限和延迟量误差、偏振片透光轴方位角误差对测量结果的影响。
Abstract
To study the phase- shifting characteristic of retarder array in simultaneous phase- shifting interferometry, the relationship between phase shift and fast-axis azimuth error is deduced through Jones vector and Jones matrix, and the error propagation formula is given. A spherical mirror is measured by simultaneous phaseshifting interferometer based on retarder array without calibrating fast-axis azimuth accurately and Zygo GPI XP interferometer, the difference of root-mean-square and peak-to-valley are 0.003l and 0.033l respectively. The influence of azimuth error tolerance and phase shift error of retarder array and optical axis azimuth error of polarizer is discussed.
郑东晖, 陈磊, 李博, 李金鹏, 乌兰图雅. 同步移相干涉仪中的延迟阵列移相特性研究[J]. 光学学报, 2015, 35(4): 0412004. Zheng Donghui, Chen Lei, Li Bo, Li Jinpeng, Wulan Tuya. Research on Phase-Shifting Characteristic of Retarder Array in Simultaneous Phase-Shifting Interferometer[J]. Acta Optica Sinica, 2015, 35(4): 0412004.