Chinese Optics Letters, 2015, 13 (4): 041402, Published Online: Sep. 21, 2018  

Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses Download: 958次

Author Affiliations
1 Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
2 Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA
Abstract
A surprising phenomenon can be discovered by using femtosecond double-pulse ablation of silicon and germanium in ethanol. The ablation areas present an oscillation increase phenomenon when the pulse delay increases from 200 fs to 1 ps in the fluence range of 0.50.6 J/cm2. In contrast, the ablation areas exhibit an oscillation decrease phenomenon as the pulse delay increases when the laser fluence F<0.5 J/cm2, which is consistent with the results of the experiment in air. It is considered that the adjustment of the photon–electron coupling efficiency by pulse train technology plays an important role in the ablation process.

Guangming Zhang, Xin Li, Lan Jiang, Xuesong Shi, Kaihu Zhang, Qiang Cao, Yongfeng Lu. Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses[J]. Chinese Optics Letters, 2015, 13(4): 041402.

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