为了满足强激光系统中大尺寸镀金光栅对糟深均匀性的要求, 采用梯形光栅-涂胶-离子束溅射镀膜和全息光刻-离子束溅射镀膜两种方法, 分别制作了线密度为1 740 线/mm, 槽深为210 nm 的宽带镀金正弦光栅．测得其TM波、－1级自准值平均衍射效率在750~850 nm范围内大于87%, 最高可达90%．这两种方法易控制光栅槽深, 去掉光刻胶后基底可继续使用, 且制作的光栅的衍射效率和带宽能满足国内一般宽带镀金脉冲压缩光栅的使用要求.

In order to satisfy the requirements of large aperture broadband gold-coated gratings groove depth uniformity in the high-power laser system, Broadband sinusoidal gold-coated gratings with line densities of 1 740 lines /mm and groove depth of 210 nm have been successfully fabricated via the methods of trapezoidal grating-coating-deposition and holographic lithography-deposition. The average diffraction efficiency at the －1 order ( Littrow mount) is above 87% and the peak value is 90% for TM polarized light spanning wavelengths from 750 to 850 nm. The experimental results show that Gratings groove depth can be easily controlled. After removing the coated photoresist, the substrate could be reused. Diffraction efficiency and bandwidth meet the requirements of the domestic general broadband pulse compression gold-coated gratings.