为了改善传统硬件相位测量中存在电路复杂、测量精度低、工作频带宽窄等诸多缺陷,利用AD8302的良好高频测相能力,设计了一种新的激光外差干涉信号处理系统,分析了其工作原理,并取得了静态、动态实验数据.结果表明,系统测量误差小于0.5°,使外差干涉理论测量分辨率提高到0.088nm,更有利于微振动信号的测量.

In order to overcome defects of the traditional phase measurement hardware,such as circuit complexity,low measurement precision and narrow band width,a novel signal processing system of a laser heterodyne interferometer was designed based on AD8302 with good performance.The work theory of the system was analyzed in detail.Static and dynamic experimental data were obtained.The results show that measurement error of the system is less than 0.5° and the measurement resolution of heterodyne interference can reach 0.088nm in theory which is more conductive to measure the microvibration signal.