利用磁控等离子体溅射团簇束流沉积法制备不同覆盖率的Ag 团簇薄膜，控制薄膜的组装结构以及与罗丹明6G(RH6G)分子的间距，研究薄膜的表面等离激元(SPP)对分子发光增强的作用。结果表明，当分子与薄膜紧邻时，将导致其荧光的淬灭,当分子与薄膜之间有氮化硅介质阻隔层时可有效抑制荧光的淬灭。当在薄膜与分子间生长厚度为15 nm 左右的介质阻隔层时，使分子荧光增强约450%。随着介质阻隔层厚度增加，荧光增强强度按e 指数衰减。

The siliver clusters films of different coverage rates are generated with a magnetron plasma gas aggregation clusters source, the assembling of films and the space with RH6G molecules can be tuned. The effect of surface plasmon polaritions in the films for use as fluorescence enhancement of molecules is investigated. It shows that fluorescence quenching appears when the films contact closely to the molecules, the silicon nitride spacer is thick enough to avoid fluorescence quenching. When silicon nitride thickness is 15 nm, the fluorescence intensity of molecules is enhanced by 450%. Fluorescence intensity decreases exponentially when the thickness of the silicon nitride spacer increases further.