为了对光学薄膜的内部缺陷进行无损高精度检测，采用了谱域光学相干层析成像(OCT)的方法，并进行了理论分析和实验验证，获得了单层和多层光学薄膜样品的二维层析图像。根据薄膜的二维层析图像，可以清晰地观察到薄膜的内部缺陷，并能够对缺陷位置进行定位。实验结果表明，谱域OCT 技术是一种光学薄膜缺陷检测的有效方法。

Spectral-domain optical coherence tomography (OCT) is used for the inner defect detection of the optical thin film with high accuracy. It is theoretical analyzed and experimentally validated. The two-dimensional (2-D) cross-sectional images of the optical thin film with single layer and multi-layer structure are obtained respectively. Based on the 2-D cross-sectional images, the defect in the film can be observed clearly, and the position of the defect in film can be located. It is demonstrated that spectral-domain OCT is an effective method for defect detection of the optical film.