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高能窄带激光系统中光谱纯度检测的实验研究

Experimental Study on Spectral Purity Detecting in High-Energy Narrow-Linewidth Laser System

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摘要

针对高能窄带激光系统对光谱纯度检测的需求,提出通过精确测量激光光谱能量分布情况分析光谱纯度的方法,并进行了相关实验研究。该光谱纯度检测装置主要由中阶梯光栅、精密移动刀口、灵敏功率计等组成,实验利用该装置分析了复合腔结构准分子激光系统输出激光的光谱纯度,实验结果表明通过精确测量激光中各光谱成分所占的能量比例可实现光谱纯度的检测。该光谱纯度检测装置结构紧凑、成本较低、测量准确度高,在高能窄带激光系统搭建过程中具有重要的应用价值。

Abstract

For the demand of spectral purity detecting in high-energy narrow-line width laser system, a method of spectral purity analysis by measuring the spectral energy distribution is reported and experimentally studied. The spectral purity analysis device is mainly composed of echelle grating, moveable blade, sensitive power meter,etc. The output spectrum of excimer laser system with a compound cavity is analysed by using this device. The experimental results show that the spectral purity detection can be achieved by accurately measuring the energy ratio of the spectral components. The spectral purity analysis device has the advantages of compact structure, low cost and high accuracy, which has important application in the building process of high-energy narrow-linewidth laser system.

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中图分类号:TN247

DOI:10.3788/lop52.073002

所属栏目:光谱学

基金项目:国家自然科学基金(61405202)、北京市科技专项(Z141104004414069)

收稿日期:2015-03-09

修改稿日期:2015-03-18

网络出版日期:2015-05-20

作者单位    点击查看

吴月婷:中国科学院光电研究院, 北京 100094中国科学院大学, 北京 100049
范元媛:中国科学院光电研究院, 北京 100094
刘广义:中国科学院光电研究院, 北京 100094
周翊:中国科学院光电研究院, 北京 100094

联系人作者:吴月婷(wuyueting@aoe.ac.cn)

备注:吴月婷(1990—),女,硕士研究生,主要从事准分子激光及固体激光光谱控制方面的研究。

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引用该论文

Wu Yueting,Fan Yuanyuan,Liu Guangyi,Zhou Yi. Experimental Study on Spectral Purity Detecting in High-Energy Narrow-Linewidth Laser System[J]. Laser & Optoelectronics Progress, 2015, 52(7): 073002

吴月婷,范元媛,刘广义,周翊. 高能窄带激光系统中光谱纯度检测的实验研究[J]. 激光与光电子学进展, 2015, 52(7): 073002

被引情况

【1】范元媛,周翊,刘广义,宋兴亮,单耀莹,王倩,赵江山. 高效率ArF 准分子激光复合腔技术研究. 中国激光, 2016, 43(2): 202001--1

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