中国激光, 2015, 42 (6): 0615001, 网络出版: 2022-09-23
铜铝合金溅射薄膜的飞秒激光诱导击穿光谱分析
Femtosecond Laser-Induced Breakdown Spectral Analysis of Cu-Al Alloy Sputtered Thin Films
光谱学 铜铝合金 溅射薄膜 飞秒激光诱导击穿光谱 定量分析 spectroscopy Cu-Al alloy sputtered thin film femtosecond laser induced breakdown spectroscopy quantitative analysis
摘要
采用飞秒激光诱导击穿光谱(fs-LIBS)技术研究了铜铝合金溅射薄膜的时间分辨等离子体光谱特性。测量了0~1000 ns延时和100~1000 ns门宽条件下薄膜的激光诱导击穿光谱(LIBS)，分析了Al I 396.2 nm 谱线的Stark展宽情况，采用定标曲线和自由定标方法对铜铝合金溅射薄膜进行了定量成分分析，并比较了其与靶材成分之间的差异。结合同步瞬态反射率测试对薄膜进行了深度剖析，单脉冲平均取样深度约为90 nm。
Abstract
Femtosecond laser induced breakdown spectroscopy (fs-LIBS) is employed to analyze Cu-Al sputtered thin films. The laser induced plasma spectra at different delay time (0~1000 ns) and gate width (100~1000 ns) are obtained. The Stark broadening effects are analyzed for the Al I line at 396.2 nm. Quantitative component analysis for the thin films is carried out with the calibration curve (CC) and the calibration free (CF) method, respectively. The composition difference between the thin films and corresponding targets is compared as well. Additionally, depth profiling is carried out for Al67Cu33 thin films using fs-LIBS combined with a synchronous real-time reflectivity monitoring sub-system. An average ablation depth of 90 nm per pulse is observed at the laser energy of 0.2 mJ.
蔡志龙, 杨秋松, 王阳. 铜铝合金溅射薄膜的飞秒激光诱导击穿光谱分析[J]. 中国激光, 2015, 42(6): 0615001. Cai Zhilong, Yang Qiusong, Wang Yang. Femtosecond Laser-Induced Breakdown Spectral Analysis of Cu-Al Alloy Sputtered Thin Films[J]. Chinese Journal of Lasers, 2015, 42(6): 0615001.
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