采用磁控溅射镀金银膜,长时间热处理合金化制备前驱体合金,以渐进浓度的硝酸自由腐蚀去合金化成功制备出具有自支撑结构的纳米多孔金薄膜.采用扫描电镜和X射线能谱仪对去合金腐蚀前后样品的形貌和成分进行了分析,结果表明:400 ℃,36 h的热处理使得薄膜样品完全合金化,获得了结晶致密的Au42Ag58合金膜;渐进浓度的自由腐蚀避免了薄膜的完全开裂,获得了样品尺寸大于15 mm×15 mm、厚度400~500 nm、孔隙率约56%、具有自支撑结构的纳米多孔金薄膜,其微观结构为连续的三维多孔结构,系带尺寸40~140 nm,80~100 nm的系带达58%.

The free-standing nanoporous gold film was synthesized by free corrosion dealloying in the increasing HNO3 solution.Au-Ag precursors was preparated by alloying the Au and Ag film of the magnetron sputtered.Micro-structure and composition of the sample before and after dealloying were characterized with scanning electron microscope and energy dispersive analysis of X-ray.The results indicated that the Au-Ag alloy precursors were obtained by 400 ℃ heat-treatment for 36 h.The increasing HNO3 solution prevented the surface to crack.The self-supported nanoporous gold with size up to 15mm×15 mm,thickness of 400-500 nm,ligament size of 40-40 nm,porosity of 56% were obtained.