为了研制具有高导通电流和高导通速率能力的单触发开关,利用微加工技术制备了基于Parylene C的三明治结构单触发开关.在主回路充电电压1.0 ~1.6 kV的范围内,分析了开关触发回路电流、电压特性,导通峰值电流、上升时间、开关延迟时间,并且对单触发开关的电感、电阻做了估算.结果表明,基于Parylene C的单触发开关性能优于基于聚酰亚胺的单触发开关;随着开关加载电压的升高,开关导通的峰值电流呈现不断增大的趋势,但是上升时间几乎不变,其延迟时间分布在1~200 μs之间,呈随机性分布,开关电阻随其作用时间增加不断增大.

To develop a trigger switch for application in the exploding foil initiator,a one-shot switch of sandwich structure with Parylene C film as dielectric layer was fabricated based on micro-fabrication technology.In the experiments,the characteristics of the switch were analyzed by applying a main voltage varying from 1.0 kV to 1.6 kV.The results show that the peak current is 1020 A and the rise time is about 240 ns when the applied voltage reaches 1.4 kV.The performance of the one-shot switch based on Parylene C is better than that based on Polyimide.The peak current shows an increasing trend with increasing the loaded voltage while the rise time is almost the same.The delay time distributes randomly between 1μs and 200 μs.The experimental simulation results show that the switch resistance increases with time.