半导体光电, 2015, 36 (1): 16, 网络出版: 2015-06-25
基于不同衬底的二氧化硅可调复用器/解复用器的单片集成芯片研究
Monolithic Integration of Silica VMUX/DEMUX Based on Different Substrates
摘要
分别设计制备了基于石英衬底和硅衬底的16通道200GHz二氧化硅可调复用器/解复用器。该器件由一个16通道200GHz的阵列波导光栅(AWG)和Mach-Zehnder干涉型热光可调光衰减器(VOA)阵列构成。在衰减量达到20dB的时候, 基于石英衬底的器件的外加偏压和功耗分别是11.7V和110mW; 而基于硅衬底的器件的外加偏压和功耗分别是22V和380mW。分析了基于不同衬底的器件性能出现差别的原因, 并设计了新的结构, 提高了器件性能。
Abstract
A 16-channel 200GHz silica variable optical attenuator multiplexer/demultiplexer (VMUX/DEMUX) based on quartz and silicon substrates are designed, respectively. The proposed VMUX/DEMUX consists of a 16-channel 200GHz arrayed waveguide grating (AWG) and an array of Mach-Zehnder interferometer (MZI) thermo-optic variable optical attenuators (VOAs). At the attenuation of 20dB, the voltage applied and power consumption of the device based on quartz substrate is 11.7V and 110mW, which is better than the presently known results; however, the voltage and power consumption of the device based on silicon substrate is 22V and 380mW. Then the performance differences of the devices based on different substrates were analyzed. Lastly, a new structure is developed so as to improve the device performance.
代红庆, 安俊明, 王玥, 张家顺, 王亮亮, 王红杰, 李建光, 吴远大, 钟飞, 查强. 基于不同衬底的二氧化硅可调复用器/解复用器的单片集成芯片研究[J]. 半导体光电, 2015, 36(1): 16. DAI Hongqing, AN Junming, WANG Yue, ZHANG Jiashun, WANG Liangliang, WANG Hongjie, LI Jianguang, WU Yuanda, ZHONG Fei, ZHA Qiang. Monolithic Integration of Silica VMUX/DEMUX Based on Different Substrates[J]. Semiconductor Optoelectronics, 2015, 36(1): 16.
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