由厄米-高斯光束理论和空间相干性定理出发,研究了大功率垂直腔面发射激光器(VCSEL)三角形列阵器件的光束质量和空间相干特性.采用二阶距法和空间相干度积分法得到980 nm波段VCSEL三角列阵器件的远场发散角和空间相干度,并讨论了列阵器件单元间距对其远场特性和空间相干特性的影响.实验结果表明:当三角列阵单元孔径为150 μm时,随着列阵单元间距由200 μm增大到300 μm,列阵器件的远场发散角由9.5°增加到12.5°,而其空间相干度由0.719减小到0.526.在相同注入电流条件下,3种列阵器件的出光功率基本相同.

The spatial coherence properties of high power vertical cavity surface emitting lasers (VCSELs) triangle-arrays were studied based on the theorem of Hermitian-Gaussian beams and spatial coherence.The far-field divergence angle and spatial coherence degree were gauged using the second-moment method and spatial coherence degree integral average value method for the devices of 980 nm wavelength VCSEL arrays.The influence of array-units distance on far-field characteristics and coherent characteristics was also discussed.With the increasing of array element spacing from 200 μm to 300 μm,the far-field divergence angle of VCSEL arrays device increases from 9.5° to 12.5°,and the spatial coherence degree decreases from 0.719 to 0.526,while the unit aperture of triangle array is 150 μm.Under the same injection current condition,the optical powers of three VCSEL array devices are almost equal.