为了解决射频板条CO2激光器因安装或腔镜热畸变造成的光路偏移问题, 采用外光路偏移补偿的方法对其进行校正。研究了基于压电陶瓷的偏移补偿装置, 设计了压电陶瓷驱动电路,并分析了控制精度和自适应控制方法。结果表明, 通过偏移补偿装置, 激光输出功率在任何占空比下均可达到或超过标准参考功率值, 并通过对比有无自适应调节, 激光输出功率最大相差100W, 且可保持激光输出功率在2h运行中波动小于2%。此项研究可保证激光器高效运行, 提高激光器的输出功率和模式的稳定性, 具有较大的实用价值。

In order to solve the problem of the output beam offsets induced by assembling and heat distortion of mirrors in radio frequency slab CO2 lasers, offsets were compensated by means of the outside optics. An offset compensation device was designed based on piezoelectric ceramics. Piezoelectric ceramics actuators were designed and the control accuracy and adaptive control method were analyzed. The results show that laser output power at any duty ratio can meet or exceed the standard reference power value after compensation. The maximum difference of output power is 100W before and after adaptive regulation and the laser output power fluctuation is less than 2% during the running of 2h. The output beam compensation can ensure laser run efficiently, increase the stability of laser power and laser mode. The research has the high practical value.