激光技术, 2015, 39 (4): 497, 网络出版: 2015-07-10   

基于激光散斑角度相关法表面粗糙度测量

Measurement of surface roughness based on laser angular-speckle correlation method
作者单位
1 长春理工大学 光电工程学院,长春 130022
2 中国科学院 长春光学精密机械与物理研究所, 长春 130033
摘要
为了完成对精密机械表面粗糙度的精确测量, 基于远场角度散斑强度的相关理论, 采用激光散斑方法设计了表面粗糙度测量的实验光路。在实验光路中, 将平面镜与待测粗糙表面固锁在一起, 当转动待测粗糙表面时, 平面镜与分束镜、接收屏组成了测量转动角度的光指针, 提高了转动角度的测量准确度。在数据处理中, 提出了基于MATLAB软件的角度散斑相关度峰值的计算方法, 简化了测量步骤, 提高了测量速度, 进而利用相关度峰值计算求得表面粗糙度。利用设计和组建的系统对平铣表面粗糙度标准模块的表面粗糙度进行了实际测量, 并对测量结果与标准样块的标称值进行比较, 取得了较高的测量准确度。结果表明, 此研究验证了激光散斑方法测量表面粗糙度的可行性, 对进一步完善表面粗糙度的精密测量是有帮助的。
Abstract
In order to complete accurate measurement of surface roughness of precision machinery, the experimental light path of surface roughness measurement was designed based on far-field angular-speckle correlation theory. In the measurement light path, a mirror was fixed together with the measured rough surface. While rotating the rough surface, a light pointer was composed by the mirror, beam splitter and receiving screen for measuring the rotation angle, and the measurement accuracy of the rotation angles was improved. During data processing, the peak value calculation method of angular-speckle correlation degree based on MATLAB software was proposed. By means of this method, the measurement procedure was simplified and the measurement speed was improved. And then, the surface roughness was calculated by using the correlation peak value method. As an example, the surface roughness of milling flat was measured. The measurement results were compared with the standard values. High accuracy of measurement was achieved. The results show that the feasibility of measuring the surface roughness by using laser speckle method is verified and the study is helpful to improve the precision measurement of surface roughness further.

陈晨, 郭晓明, 马军, 王文生. 基于激光散斑角度相关法表面粗糙度测量[J]. 激光技术, 2015, 39(4): 497. CHEN Chen, GUO Xiaoming, MA Jun, WANG Wensheng. Measurement of surface roughness based on laser angular-speckle correlation method[J]. Laser Technology, 2015, 39(4): 497.

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