激光与光电子学进展, 2015, 52 (8): 081201, 网络出版: 2015-07-29
光干涉法测量压电装置的响应特性 
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Measurement of Piezoelectric Device Response by Optical Interferometry
摘要
针对一种压电陶瓷预负载结构,利用光学干涉法测量了其位移-电压特性,在测量过程中观察到压电装置及其支撑结构本身的共振会影响测量结果的准确性.进而对不同材质的多种压电装置采用不同的驱动频率进行了对比实验,证明了基于传统的测量装置应采用多次测量以获得更严谨的压电响应参数.
Abstract
The displacement-voltage characteristics of a pre-load structure piezoelectric ceramic is measured by using optical interferometry.The influence of the resonance of piezoelectric device and its supporting structure on the accuracy of the measurement is observed.Furthermore,the comparative experiments are set up to study a variety of piezoelectric devices under several driving frequencies.It is proved that multiple-time measurement based on traditional device is necessary to get a more rigorous result of the piezoelectric response parameters.
杨彬, 赵琦, 周军, 陈延如, 吴佳滨, 宋维尔. 光干涉法测量压电装置的响应特性[J]. 激光与光电子学进展, 2015, 52(8): 081201. Yang Bin, Zhao Qi, Zhou Jun, Chen Yanru, Wu Jiabin, Song Weier. Measurement of Piezoelectric Device Response by Optical Interferometry[J]. Laser & Optoelectronics Progress, 2015, 52(8): 081201.
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