激光与光电子学进展, 2015, 52 (9): 091404, 网络出版: 2015-08-28
980 nm高功率脊型波导半导体激光器 
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High Power 980 nm Ridge Waveguide Semiconductor Laser Diode
激光器 980 nm 半导体激光器 可靠性 宽波导 灾变性光学损伤 lasers 980 nm semiconductor laser diodes reliability broad-waveguide catastrophic optical damage
摘要
介绍了高功率980 nm 脊型波导半导体激光器的设计及制造。为了减少腔面处的光功率密度，设计了宽波导结构。利用常规工艺获得了最大500 mW 输出的器件，同时灾变光学损伤阈值达到了560 mW。
Abstract
The design and fabrication of high power 980 nm ridge waveguide semiconductor laser diodes are described. To reduce the optical power density on facets, the broad-waveguide structure is designed. The 500 mW kink-free laser diodes is obtained by standard ridge waveguide laser diode process techniques, and the catastrophic optical damage (COD) level of the LDs is 560 mW.
刘斌, 刘媛媛. 980 nm高功率脊型波导半导体激光器[J]. 激光与光电子学进展, 2015, 52(9): 091404. Liu Bin, Liu Yuanyuan. High Power 980 nm Ridge Waveguide Semiconductor Laser Diode[J]. Laser & Optoelectronics Progress, 2015, 52(9): 091404.
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