激光与光电子学进展, 2015, 52 (9): 092203, 网络出版: 2015-08-28
Φ 300 mm平面标准镜高精度支撑关键技术 
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Key Technique in Supporting of Φ 300 mm Aperture Reference Flat Mirror
光学设计 光学检测 平面标准镜 有限元法 参考面面形 optical design optical test reference flat mirror finite element method shape of reference surface
摘要
为保证大口径平面面形的高精度检测，必须对大口径平面标准镜自身的精度进行严格控制。在考虑标准镜自身重力的作用下，通过有限元方法仿真分析了不同粘胶位置以及不同镜框支撑方式下参考面面形的变化。根据分析结果，设计了口径300 mm 的平面标准镜支撑方式，镜片采用12 点粘胶与镜框固定，镜框下表面采用旋转补偿的方式寻找最优支撑方案。对加工完成的Φ 300 mm 平面标准镜进行了集成装配，装配结果显示支撑引入的参考面面形变化约为1.294 nm[均方根(RMS)值]，与仿真分析结果吻合，并且满足大口径平面检测的检测需求。
Abstract
In order to ensure the high measuring precision of large-aperture flat mirror, the accuracy of the largeaperture reference flat mirror must be controlled strictly. The influence of different distribution of adhered spots and different support schemes on the shapes of reference flat mirror are analyzed by means of finite element method (FEM) under gravitational conditions. A kind of support pattern of 300 mm aperture reference flat mirror is designed. The mirror is supported by 12 adhered spots, and the best supporting method of mirror frame by rotation compensation is researched. The Φ 300 mm reference flat mirror is assembled according to the analysis above. The assembly results indicate that the change of optical surface due to supporting is nearly 1.294 nm of root mean square (RMS), which coincides with the analysis and satisfies the requirement of shape precision of the large aperture reference flat mirror.
方斌, 田伟, 王汝冬, 朱岩, 张永凯, 王飞. Φ 300 mm平面标准镜高精度支撑关键技术[J]. 激光与光电子学进展, 2015, 52(9): 092203. Fang Bin, Tian Wei, Wang Rudong, Zhu Yan, Zhang Yongkai, Wang Fei. Key Technique in Supporting of Φ 300 mm Aperture Reference Flat Mirror[J]. Laser & Optoelectronics Progress, 2015, 52(9): 092203.
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