光电子技术, 2015, 35 (2): 115, 网络出版: 2015-09-08
可见-近红外响应InGaAs光电倍增管
Development of a Visible-near Infrared Light Responsive InGaAs Photomultiplier Tube
负电子亲和势光电阴极 光电倍增管 negative electron affinity photocathode GaAs GaAs InGaAs InGaAs photomultiplier tube
摘要
光电倍增管, 在单光子探测应用中, 有独特优势, 其有效面积大, 暗电流低, 且倍增系数大。基于三代负电子亲和势阴极技术研究了InGaAs光电倍增管, 利用GaAs衬底外延InGaAs, 将三代光电阴极截止波长从920 nm拓展至1100 nm, 阴极积分灵敏度340 uA/lm, 光谱峰值830 nm, 1000 nm辐射灵敏度6.2 mA/W, InGaAs性能达到日本滨松公司V8071U-76产品水平。在内置2块微通道板后, 整管电子倍增系数大于105。
Abstract
Photomultiplier tube, with its large photo detection area, low dark current, high electron multiplication factor, gets advantage in single photon detection application. The InGaAs photomultiplier tube is made using Gen III photocathode technology. The photo response cutoff wavelength is extended from 920 nm to 1100 nm by InGaAs epitaxy on GaAs substrate. The photocathode sensitivity of 340 uA/lm, peak wavelength at 830 nm, 1000 nm radiation sensitivity of 6.2 mA/W, all these parameters make the tube perform at Hamamatsu InGaAs product (V8071U-76) level. With 2 MCP embedded, the InGaAs PMT has electron multiplication factor larger than 105.
王旺平, 马建一. 可见-近红外响应InGaAs光电倍增管[J]. 光电子技术, 2015, 35(2): 115. WANG Wangping, MA Jianyi. Development of a Visible-near Infrared Light Responsive InGaAs Photomultiplier Tube[J]. Optoelectronic Technology, 2015, 35(2): 115.