红外技术, 2015, 37 (6): 506, 网络出版: 2015-09-08
液相外延碲镉汞表面化学腐蚀研究
Study on Chemical Etching of LPE HgCdTe Surface
碲镉汞 化学腐蚀 原子力显微镜 X射线光电子能谱 HgCdTe chemical etching atomic force microscope(AFM) X-ray photoelectron spectroscopy(XPS)
摘要
应用不同浓度的溴甲醇溶液对液相外延碲镉汞表面进行化学腐蚀, 并且测量了腐蚀速率。然后通过原子力显微镜及 X射线光电子能谱分析了碲镉汞材料的表面状态。发现经过溴甲醇溶液腐蚀后, 碲镉汞表面富碲现象较为严重而且表面粗糙度略有增加。
Abstract
Different concentrations of Br2/Methanol solution were used for chemical etching on the LPE HgCdTe surface. Then we measured erosion rate and analysed surface conditions of HgCdTe through atomic force microscope(AFM) and X-ray photoelectron spectroscopy(XPS). It was found that etching treatment of HgCdTe in Br2/Methanol solution introduces serious Te-rich surface and low rms roughness.
周连军, 王静宇, 田丽萍, 任华, 袁绶章, 李东升, 舒畅, 王晓娟, 谢刚, 周嘉鼎. 液相外延碲镉汞表面化学腐蚀研究[J]. 红外技术, 2015, 37(6): 506. ZHOU Lian-jun, WANG Jing-yu, TIAN Li-ping, REN Hua, YUAN Shou-zhang, LI Dong-sheng, SHU Chang, WANG Xiao-juan, XIE Gang, ZHOU Jia-ding. Study on Chemical Etching of LPE HgCdTe Surface[J]. Infrared Technology, 2015, 37(6): 506.
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