在高功率准分子系统中，为实现窄脉宽激光放大和满足辐照均匀性的要求，采用了光学角多路技术，系统光束数量多、传输环节多，具有很高的光学复杂性。为保证系统高效稳定运行，需要实时监测和评价各个环节的工作状态，即对“平台”中每一放大级和众多光束的激光参数进行在线诊断和测量。为此，针对高功率准分子激光系统的特点，提出了一种分时测量技术，并进行了原理性实验研究。该技术可采用一套测试元件实现多路激光能量和波形参数的在线测量，优点是不仅可以提高测试效率，可降低测试系统的复杂度和造价，而且可避免由不同测量元件带来的系统误差。

In high power excimer laser system, in order to achieve short pulse amplification and fine spot uniformity, angular multiplexing technique is adopted. So there are many laser beams and optical transmission links, which make the system complicated. In order to ensure the system working stably and efficiently, it needs to monitor and evaluate the status of all the links of system, which means online measurement of each amplification stage and multiple laser beams. Therefore, considering the character of the high power excimer laser system, a measure technique based on time-sequence method is proposed and principle experiments are carried on. Using this technique, online measurement of multiple beams using only one set of measuring elements can be achieved. The merit of this method is not only measurement efficiency can be promoted, but also the complication and cost is brought down, and the system errors caused by different elements are also avoided.