激光与光电子学进展, 2015, 52 (10): 101104, 网络出版: 2015-10-08   

镜面散射对显微物镜杂散光特性影响的仿真研究 下载: 878次

Simulation about Influence of Specular Scattering on Microscope Objective Stray Light Characteristics
胡慧杰 1,2,3,*巩岩 2武晓东 1
作者单位
1 中国科学院苏州生物医学工程技术研究所江苏省医用光学重点实验室, 江苏 苏州 215163
2 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033
3 中国科学院大学, 北京 100049
摘要
杂散光是影响显微系统成像质量的重要因素之一,在光学镜面加工及光学镜面清洁过程中会带来不同程度的镜面散射,这部分镜面散射所带来的杂散光影响不可忽视。以放大倍率为20×,数值孔径为0.49 的显微物镜为基础,利用TracePro 光学分析软件,建立了黑斑法测量显微物镜杂散光系数的仿真模型,对照明数值孔径、照明视场以及黑斑位置三个影响杂散光测量条件的因素进行仿真探究,验证了模型的可行性。在此基础上,研究了表面粗糙度(2、5、10、20 nm)和表面颗粒污染水平(230、500、750)对不同NA 显微物镜杂散光的影响。仿真结果表明,表面粗糙度大于10 nm 或表面洁净度大于500 均会严重影响显微物镜像面杂散光的分布,降低显微物镜的成像质量,尤其对大NA显微物镜影响更为明显。因此,为控制镜面散射对显微系统性能的影响,应提高镜面加工工艺并保持镜面清洁。
Abstract
Stray light is one of the important factors affecting the image quality of microscopy systems. During the processing of optical elements, stray light caused by specular scattering can not be ignored. Taking microscope objectives with 20× magnification and NA=0.49 as a typical example and using the optical analysis software TracePro, a simulation model of measuring veiling glare of microscope objectives is built up. Through analyzing the factors affecting the model with different illuminance numerical apertures, different illuminance fields and different black spot positions, the feasibility of the model is verified. On this basis, the stray light intensity on the image plane with different NA microscope objectives is simulated quantitatively under the condition of different surface roughness (2, 5, 10, 20 nm) and different cleanliness levels (250, 500, 750). The results indicate that the surface roughness greater than 10 nm and the cleanliness level higher than 500 will change the stray light intensity distribution on the image plane, and affect the system performance significantly, especially for those microscope objectives with large NA. It is of critical importance to keep the surface of optical elements clean and to improve the processing technology of optical elements.

胡慧杰, 巩岩, 武晓东. 镜面散射对显微物镜杂散光特性影响的仿真研究[J]. 激光与光电子学进展, 2015, 52(10): 101104. Hu Huijie, Gong Yan, Wu Xiaodong. Simulation about Influence of Specular Scattering on Microscope Objective Stray Light Characteristics[J]. Laser & Optoelectronics Progress, 2015, 52(10): 101104.

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