首页 > 论文 > 光学技术 > 41卷 > 5期(pp:385-389)

激光差动共焦显微成像中的轴向快速定焦方法

The method of axial fast identified focus of laser differential confocal microscopy imaging

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

提出了一种基于光强信号实时判断的快速定焦方法, 在对样品进行横向扫描的同时, 驱动测量物镜轴向移动, 对前焦探测器和后焦探测器采集到的光强信号进行实时处理, 通过实时判断测量面与样品的位置关系迅速找到焦面位置, 可实现快速、准确的轴向定焦, 极大地提升了定焦速度。理论分析和初步的实验表明, 该方法在一副图像的采集周期内能够实现轴向定焦, 在同等定焦精度条件下, 与清晰度定焦方法相比, 可节省90℅以上的定焦时间。

Abstract

A fast axial focus identification method based on real-time judgment of light intensity signal is proposed. The samples is scanned by the method in the horizontal plane with the axial movement of measurement objective. The method can real-timely observes and disposes the optical intensity signal collected by the detector before the focus and the detector behind the focus. The focal plane is found through judging the positional relation of measurement surface and sample of the real-time image. It can realize the fast and accurate axial focus identification, and improves the identification speed of the focus significantly. The theoretical analysis and preliminary experiments show that the method can achieve axial focus identification in a scan cycle. In comparison with the definition method of the focus, it saves the process time of more than 90% with the same identification accuracy of the focus.

广告组1 - 空间光调制器+DMD
补充资料

中图分类号:TH741

所属栏目:光学测量

基金项目:国家自然科学纳米制造重大研究计划资助项目(91123014); 国家重大科学仪器开发专项(2011YQ04013601); 国家高技术研究发展计划(SS2012AA040507)

收稿日期:2014-11-13

修改稿日期:2015-01-12

网络出版日期:--

作者单位    点击查看

毛新越:北京理工大学 光电学院 “精密光电测试仪器及技术”北京市重点实验室, 北京 100081
赵维谦:北京理工大学 光电学院 “精密光电测试仪器及技术”北京市重点实验室, 北京 100081
王允:北京理工大学 光电学院 “精密光电测试仪器及技术”北京市重点实验室, 北京 100081
刘大礼:北京理工大学 光电学院 “精密光电测试仪器及技术”北京市重点实验室, 北京 100081
王蕾:北京理工大学 光电学院 “精密光电测试仪器及技术”北京市重点实验室, 北京 100081

联系人作者:毛新越(bfmxysun@126.com)

备注:毛新越(1989-), 男, 硕士研究生, 从事激光差动共焦显微成像系统的设计研究

【1】Hamilton D K,et al. Three-dimensional surface measurement using the confocal scanning microscope[J]. Appl. Phys. B, 1982, 27: 211-213.

【2】Kohno T, et al. High precision optical surface sensor[J]. Applied Optics, 1988, 27(1): 103-108.

【3】Hell S, et al. Fundamental improvement of resolution with a 4Pi-confocal fluorescence microscope using two-photonexcitation[J]. Optics Communications, 1992, 93: 277-282.

【4】Yang L S, et al. Surface profilometry with a fibre optical confocal scanning microscope[J]. measurement Science and Technology, 2000, 11: 1786-1791.

【5】Zhao W Q, et al. Bipolar absolute differential confocal approach to higher spatial resolution[J]. Optics Express, 2004, 12(21):281-286. (in Chinese).

【6】Zhao W Q, et al. SABCMS, a new approach to higher lateral resolution of laser probe measurement system[J]. Sensors and Actuators A , 2005, 120:17-25.

【7】Zhao W Q, et al. Tri-heterodyne confocal microscope with axial superresolution and higher SNR[J]. Optics Express,2004, 12(21):5191-5197.

【8】李婧, 等. 激光扫描共聚焦显微镜自动对焦研究[J].激光杂志,2006,27(6):37-39.
Li J, et al. Focusing of laser scanning confocal microscopy[J]. Laser Journal, 2006,27(6):37-39.

【9】姜志国,等. 基于全自动控制显微镜的自动聚焦算法研究[J]. 中国图象图形学报A,2004,9(4):396-401.
Jiang Z G, et al. Study on auto focusing algorithm for automatic microscope[J]. Journal of Image and Graphics, 2004,9(4):396-401.

【10】孙若端,等. 激光差动共焦曲率半径测量系统的研制[J]. 仪器仪表学报,2011,32(12):2833-2838.
Sun R D, et al. Development of laser differential confocal radius measurement system[J]. Chinese Journal of Scientific Instrument, 2011,32(12):2833-2838.

【11】Zhao W Q, et al. Laser differential confocal lens refractive index measurement[J]. Applied Optics ,2011,50(24): 4769-4778.

引用该论文

MAO Xinyue,ZHAO Weiqian,WANG Yun,LIU Dali,WANG Lei. The method of axial fast identified focus of laser differential confocal microscopy imaging[J]. Optical Technique, 2015, 41(5): 385-389

毛新越,赵维谦,王允,刘大礼,王蕾. 激光差动共焦显微成像中的轴向快速定焦方法[J]. 光学技术, 2015, 41(5): 385-389

被引情况

【1】於维华,王允,邱丽荣,吴寒旭,赵维谦. 基于单步驱动的激光共焦显微镜快速定焦方法. 光学技术, 2019, 45(5): 535-540

【2】张成龙,邱丽荣,王允,吴寒旭. 大范围分光瞳激光差动共焦显微快速定焦方法. 光学技术, 2020, 46(3): 310-315

【3】叶一青,易定容,张勇贞,孔令华,蒋威. 基于倾斜摄像头的显微自动对焦方法. 光学学报, 2019, 39(12): 1218001--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF