以硬质硅片作为承载体, 在其表面合成性质可控的聚合物薄膜, 利用光刻工艺制作微结构, 将薄膜与硅片剥离, 获得在柔性衬底上大面积均匀的太赫兹器件.以聚酰亚胺薄膜为衬底的太赫兹偏振片的测试结果表明: 在0.1 THz处, 器件的偏振消光比可达到50 dB, 在0.1~2 THz范围内偏振方向的平均透过率高达89.78%, 偏振度大于99.84%, 在42.3 mm直径的区域内, 其偏振均匀性好, 达到实用化要求.

Polymer membrane with quality control on the silicon surface was synthesised, where the hard silicon was used as supportive substrate. The periodically metallic structures were patterned on the polymer film surface by normal photolithography. Finally, polymer film is peeled off from supportive silicon substrate. A large area and high uniformity of micro structures thin-film terahertz device has been obtained. A terahertz polarizer on polymide film substrate was fabricated using this method. Experimental results show that the polarization extinction ratio is more than 50dB at 0.1THz. The average transmittance reaches 89.78% in the polarization direction at the range of 0.1-2THz. The degree of polarization is over 99.84%. The polarization uniformity of the polarizer is fine around the diameter region of 42.3 mm. So, the flexible terahertz polarizer fabricated here is satisfied with practical demand.