光学学报, 2015, 35 (11): 1112002, 网络出版: 2015-11-03
用计算全息图检测非球面时的自补偿效应分析
Self-Compensating Effect Analysis in Testing Asphere with Computer-Generated Hologram
全息 计算全息图(CGH) 非球面检测 自补偿效应 holography computer-generated hologram(CGH) asphere testing self-compensating effect
摘要
用计算全息图(CGH)检测非球面时,除了设计零位补偿CGH 外,还往往设计辅助调节CGH,从而可以利用干涉图来精确调节CGH 的位置。针对这种同时具有零位补偿和辅助调节功能的CGH,提出零位补偿CGH 和辅助调节CGH 之间具有相互补偿效应。针对一高次非球面,设计了四种不同的CGH 配置方案,而后逐一分析了零位补偿CGH 和辅助调节CGH 之间的补偿效应。分析结果表明,在相同的基板误差的条件下,具有自补偿效应的配置方案的Power 项误差小于其他方案的1/40,而球差和高阶球差则小于其他方案的1/70。利用具有自补偿效应的配置方案加工制作了CGH,用此CGH 完成了对非球面的加工检测迭代,非球面面形的收敛精度均方根(RMS)达到0.48 nm。
Abstract
Besides null computer-generated hologram (CGH), the alignment CGH is usually designed for aligning the position of CGH through interferogram precisely when testing asphere with CGH. The compensating effect between null CGH and alignment CGH for the CGH which contains null CGH and alignment CGH simultaneously is presented. Four types of CGHs are designed for a high order asphere, and the compensating effects between the null CGH and alignment CGH are analyzed respectively. The results show that the configuration which has selfcompensating effect suffers less than 1/40 power error, and 1/70 spherical and high order spherical error compared to other configurations. A CGH is fabricated based on the configuration which has self-compensating effect, and thereby, the aspheric fabricating and testing are accomplished iteratively. The final testing results show that the aspheric surface figure converges at 0.48 nm root mean square (RMS).
高松涛, 武东城, 彭石军, 苏东奇, 苗二龙. 用计算全息图检测非球面时的自补偿效应分析[J]. 光学学报, 2015, 35(11): 1112002. Gao Songtao, Wu Dongcheng, Peng Shijun, Su Dongqi, Miao Erlong. Self-Compensating Effect Analysis in Testing Asphere with Computer-Generated Hologram[J]. Acta Optica Sinica, 2015, 35(11): 1112002.