光学学报, 2015, 35 (12): 1214001, 网络出版: 2015-12-10   

飞秒脉冲激光烧蚀金膜的相变传热研究

Numerical Investigation of Phase Change during Thermal Ablation of Gold Films Induced by Femtosecond Laser
作者单位
上海理工大学能源与动力工程学院, 上海 200093
摘要
采用双温度模型,对飞秒单脉冲激光照射下金膜的烧蚀过程进行了研究,通过界面能量平衡方程成核动力学方程和气体动力学定律对烧蚀过程中的固-液以及气-液界面进行了追踪。对考虑非傅里叶效应的双重双曲线两步(DHTS)模型和抛物线两步(PTS)模型的模拟结果进行了对比研究,并分析了激光和金属薄膜参数对烧蚀过程的影响。结果表明:对于飞秒激光烧蚀过程,DHTS模型的模拟结果比PTS模型的模拟结果更接近于实验数据,相同条件下DHTS模型得到的熔化以及烧蚀深度会明显高于PTS模型得到的结果;激光能量密度越大,激光脉冲宽度越小激光烧蚀的深度越深,而薄膜越厚烧蚀越弱。
Abstract
Thermal ablation process of gold film irradiated by a single femtosecond pulse laser is investigated using the two-temperature model. The phase change interface is obtained by considering the interface energy balance equation and gas kinetics law. Comparisons between numerical results with the dual-hyperbolic two-step (DHTS) model and the parabolic two-step (PTS) model are presented, the effects of laser parameters and film thickness on thermal ablation process are also investigated. Results show that compared with PTS model, the DHTS model is more close to the experimental results, the melting and ablation depth of the DHTS model are much higher than the results of the PTS model in the same conditions, and with increasing laser fluence or decreasing pulse width, the ablation depth is gradually increased, the film thickness has a slightly effect on the thermal ablation process.

赵士强, 李凌. 飞秒脉冲激光烧蚀金膜的相变传热研究[J]. 光学学报, 2015, 35(12): 1214001. Zhao Shiqiang, Li Ling. Numerical Investigation of Phase Change during Thermal Ablation of Gold Films Induced by Femtosecond Laser[J]. Acta Optica Sinica, 2015, 35(12): 1214001.

本文已被 8 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!