首页 > 论文 > 中国激光 > 42卷 > 11期(pp:1108001--1)

基于椭偏成像光路和表面等离子体共振效应的金属薄膜参数测量方法研究

Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

提出了一种基于椭偏成像光路和表面等离子体共振效应的金属薄膜参数测量方法,在椭偏成像光路中采用p偏振光在金属薄膜与空气界面产生表面等离子体共振效应,利用不产生表面等离子体共振效应的s偏振光消除背景光的影响,得到表面等离子体共振吸收环垂直方向的归一化反射率曲线,数值拟合获得待测金属薄膜的薄膜参数,这种方法不需要求解椭偏方程,数据处理过程简单,求解速度快。实验中,基于该方法的测量结果与标准椭偏仪的测量结果基本一致,很好地验证了该方法的有效性。

Abstract

A measurement method of film parameters of metal based on imaging ellipsometry and surface-plasmon resonance is presented. p polarized light is applied to generate surface-plasmon resonance effect at the interface of metal film and air in layout of imaging ellipsometry. The influence of back light is avoided by s polarized light which can′ t lead to surface- plasmon resonance effect. Then the normalized reflectance profile along the perpendicular direction of absorption ring of surface- plasmon resonance is obtained. We measure metal film parameters by numerical fitting the reflectance profile along long axis of the elliptical fringe. This method is not necessary to solve the transcendental equation and data processing is simple and fast. The experimental result with this method is coincident with that of standard ellipsometer, which verifies the validity of this measurement method.

广告组1 - 空间光调制器+DMD
补充资料

中图分类号:O439

DOI:10.3788/cjl201542.1108001

所属栏目:测量与计量

基金项目:国家国际科技合作项目(2012DFG51590,2011DFR10010)、国家科技重大专项(2011ZX02402)

收稿日期:2015-05-04

修改稿日期:2015-07-16

网络出版日期:--

作者单位    点击查看

胡仕玉:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049
曾爱军:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049
谷利元:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049
黄惠杰:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049
胡国行:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049
贺洪波:中国科学院上海光学精密机械研究所, 上海 201800中国科学院大学, 北京 100049

联系人作者:胡仕玉(janexf0729@sina.cn)

备注:胡仕玉(1988—),女,硕士研究生,主要从事光电检测技术方面的研究。

【1】H Zhu, L Liu, Y Wen, et al.. High-precision system for automatic null ellipsometric measurement[J]. Appl Opt, 2002, 41(22): 4536- 4540.

【2】A -H Liu, P C Wayner, J L Plawsky. Image scanning ellipsometry for measuring nonuniform film thickness profiles[J]. Appl Opt, 1994, 33(7): 1223-1229.

【3】D Nec as , I Ohlídal, D Franta, et al.. Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry[J]. Thin Solid Films, 2014, 571: 573-578.

【4】Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to minimize the characterization deviations of optical parameters of thin films caused by ellipsometric measurement systematic errors[J]. Acta Optica Sinica, 2012, 32(6): 0631001.
吴素勇, 龙兴武, 杨开勇. 一种最小化薄膜光学参数表征偏差的椭偏测量系统误差处理技术[J]. 光学学报, 2013, 32(6): 0631001.

【5】J C Comfort, F K Urban, D Barton, An algorithm for analyzing ellipsometric data taken with multiple angles of incidence[J]. Thin Solid Films, 1996, 290-291: 51-56.

【6】D Charlot, A Maruani. Ellipsometric data processing: an efficient method and an analysis of the relative errors[J]. Appl Opt, 1985, 24 (20): 3368-3373.

【7】S Bosch, F Monzonis, E Masetti. Ellipsometric methods for absorbing layers: a modified downhill simplex algorithm[J]. Thin Solid Films, 1996, 289(1-2): 54-58.

【8】G Cormier, R Boudreau. Genetic algorithm for ellipsometric data inversion of absorbing layers[J]. J Opt Soc Am A, 2000, 17(1): 129-134.

【9】M F Tabet, W A McGahan. Use of artificial neural networks to predict thickness and optical constants of thin films from reflectance data[J]. Thin Solid Films, 2000, 370(1):122-127.

【10】X Wang, K -P Chen, M Zhao, et al.. Refractive index and dielectric constant transition of ultra-thin gold from cluster to film[J]. Opt Express, 2010, 18(24): 24859-24867.

【11】Y P Bliokh, R Vander, S G Lipson, et al.. Visualization of the complex refractive index of a conductor by frustrated total internal reflection[J]. Appl Phys Lett, 2006, 89(2): 021908.

【12】hen Qianghua, Luo Huifu, Wang Sumei, et al.. Measurement of air refractive index based on surface plasmon resonance and phase detection by dual-frequency laser interferometry[J]. Chinese J Lasers, 2013, 40(1): 0108001.
陈强华, 罗会甫, 王素梅, 等. 基于表面等离子体共振和双频激光干涉相位测量的空气折射率测量[J]. 中国激光, 2013, 40(1): 0108001.

【13】Liu Yu, Zhang Haitao, Xu Shuping, et al.. Study on the effect of refractive index and metal film thickness on surface plasmon resonance field enhanced surface-enhanced raman scattering[J]. Chinese J Lasers, 2013, 40(12): 1207001.
刘钰, 张海涛, 徐抒平, 等. 折射率和金属膜厚度对表面等离子体共振场增强表面增强拉曼散射的影响研究[J]. 中国激光, 2013, 40(1): 0108001.

【14】Iwata T, Mizutani Y. Ellipsometric measurement technique for a modified Otto configuration used for observing surface-plasmon resonance[J]. Opt Express, 2010, 18(14): 14480-14487.

【15】Kaneoka Y, Nishigaki K, Mizutani Y, et al.. Precise measurement of the thickness of a dielectric layer on a metal surface by use of a modified Otto optical configuration[J]. International Journal of Optomechatronics, 2014, 9(1): 1-14.

引用该论文

Hu Shiyu,Zeng Aijun,Gu Liyuan,Huang Huijie,Hu Guohang,He Hongbo. Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance[J]. Chinese Journal of Lasers, 2015, 42(11): 1108001

胡仕玉,曾爱军,谷利元,黄惠杰,胡国行,贺洪波. 基于椭偏成像光路和表面等离子体共振效应的金属薄膜参数测量方法研究[J]. 中国激光, 2015, 42(11): 1108001

被引情况

【1】李桂运,谷利元,胡敬佩,朱玲琳,曾爱军,黄惠杰. 基于柱面透镜Otto结构SPR效应的金属薄膜厚度测量方法. 中国激光, 2019, 46(2): 204010--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF