用Spearman相关度分析法研究了3环带纯相位光瞳滤波器的加工质量与超分辨性能之间的显著度关系,并比较了不同环带光瞳滤波器的偏心对超分辨性能的影响.结果表明,环带的偏心与光斑半径、Strehl比的相关度系数均大于0.8,倒圆可使一级旁瓣强度的变化率高达29.04%,因此环带偏心和倒圆是决定元件性能的有效表面质量参量;外层环带偏心对超分辨性能的影响大于内层环带,需要更加严格的公差控制.该方法为微光学元件设计加工中的准确度控制提供了理论依据及可行的技术途径.

The Spearman′s correlation coefficients between various fabrication errors and functionalities were analyzed on a 3-belt phase-only pupil-filter. Three kinds of pupil-filters with different numbers of belts were compared to identify the influence of eccentricities of different belts. The correlation coefficients between eccentricity and the radius at half central intensity and Strehl ratio are both greater than 0.8,and rounding can cause the intensity of the first order sidelobe changing up to 29.04%,thus these two parameters are identified as the significant geometrical parameters. Besides,the eccentricities of outer belts affect the super-resolution performance more significantly than inner belts,therefore they need to be controlled with tighter tolerances. This method provides a theoretical foundation and a versatile technical route for the effective specification in design and manufacturing of micro-optical elements.