现有激光光束质量的测量方法无法同时兼顾测量速度与测量精度。为了达到兼顾速度与精度的目的, 提出了双狭缝扫描法。此方法不需要在光路中使用衰减器, 从而降低了数据分析复杂度。选用嵌入式技术完成对整个系统的控制与数据处理, 便于携带, 可实现对数据的实时处理;同时进行了理论分析和实验验证。结果表明, 该方法可实现快速同步测量两轴的功率分布, 动态范围可达到70dB, 扫描频率为2Hz~18Hz, 可用于分析连续或脉冲激光光束。该方法对兼顾测量速度与精度是有帮助的。

Available measurement methods of laser beam quality can’t reach the demands of speed and accuracy simultaneously. In order to take speed and precision into account, a double-slit scanning method was proposed. The complexity of data analysis reduced because attenuator was not used in the optical path. Embedded technology was selected to control and process the data, and real time data processing can be realized while the whole system was easy to carry. After theoretical analysis and experimental verification, the results show that this method can get fast synchronous measurement of dual axis shaft power distribution. Dynamic range can reach 70dB and scan rate is from 2Hz to 18Hz. This method can be used for the analysis of continuous or pulsed laser beam and is helpful for reaching the demands of both measurement speed and accuracy.